Electron Temperature Measurement of Argon Capacitive Coupling Plasma by Optical-Emission Spectroscopy

Abstract

The study of electron interaction with the electric field in low temperature plasmas is a current area of research with various practical applications. Specifically, in the context of low pressure (< 1 mtorr), electrons can travel distances comparable to the size of the reactor without experiencing collisions. The primary objective of this work is to investigate the basic physics of electron behaviors in an argon discharge at low pressure regime. The main aim of the current study is the investigation the electron temperature (Te). Optical emission spectroscopy was used as diagnostic tool to find the electron temperature based on line ratio method. The link between the fundamental plasma parameter (Te) and its spatial dynamics is analyzed. The study also looks into how the Te is affected by the input plasma radio frequency power throughout the electrode distance.